Большой англо-русский и русско-английский словарь
lithographic [lithography] technique, pattern-defining [patterning] technique
Англо-русский словарь технических терминов
lithographic [lithography\] technique, pattern-defining [patterning\] technique
Русско-английский политехнический словарь
lithographic [lithography] technique, pattern-defining [patterning] technique